Principal Investigator

Prof. Peichen Yu

Peichen Yu

Professor

Department of Photonics

National Yang Ming Chiao Tung University

Biography

Peichen Yu received the Ph.D. degree in electrical engineering from the University of Michigan, Ann Arbor, MI, USA, in 2004.

From 2004 to 2006, she joined the Advanced Design Group, Intel Corporation, Hillsboro, OR, USA, as a Resolution Enhancement Technology (RET) Design Engineer.

Since 2006, she switched careers to academia and is currently a Professor with the Department of Photonics, National Yang Ming Chiao Tung University.

Research Interests

  • Nanostructures and metasurfaces patterning for optoelectronic applications
  • Development of RET solutions, including inverse lithography technology (ILT) for ArF 193i and EUV lithography

Achievements & Membership

She has published over 60 refereed technical articles in the above research areas. Her work has been highlighted in various scientific journals, including Virtual Journal of Nanoscale Science and Technology, SPIE Newsroom, and NPG Nature Asia-Material.

She is a member of the IEEE Photonics Society and SPIE. She received several research and teaching awards in Taiwan.